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Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies 2009 edition
Badih El-Kareh
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Silicon Devices and Process Integration: Deep Submicron and Nano-Scale Technologies 2009 edition
Badih El-Kareh
Compiled from industrial and academic lecture notes and reflecting years of experience in the development of silicon devices, this book covers both their theoretical and practical aspects, and how their electrical properties and processing conditions interact.
598 pages, 17 black & white tables, biography
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | January 12, 2009 |
| ISBN13 | 9780387367989 |
| Publishers | Springer-Verlag New York Inc. |
| Pages | 598 |
| Dimensions | 155 × 235 × 33 mm · 1.04 kg |
| Language | English |
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