Microelectronic Applications of Chemical Mechanical Planarization - Y Li - Books - John Wiley & Sons Inc - 9780471719199 - November 13, 2007
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Microelectronic Applications of Chemical Mechanical Planarization

Y Li

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Microelectronic Applications of Chemical Mechanical Planarization

This book provides systematic and comprehensive description about the current state of CMP technology. It includes the important fundamentals and basic science as well, making the book fit as an introduction to CMP newcomers and a valuable reference source for professionals.

734 pages, Illustrations

Media Books     Hardcover Book   (Book with hard spine and cover)
Released November 13, 2007
ISBN13 9780471719199
Publishers John Wiley & Sons Inc
Pages 760
Dimensions 155 × 236 × 43 mm   ·   1.20 kg
Language English  
Editor Li, Yuzhuo
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