High Density Plasma Sources: Design, Physics and Performance - Popov, Oleg A. (Matsushita Electric Works, Woburn, MA, USA) - Books - William Andrew Publishing - 9780815513773 - December 31, 1996
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High Density Plasma Sources: Design, Physics and Performance 1st edition

Popov, Oleg A. (Matsushita Electric Works, Woburn, MA, USA)

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High Density Plasma Sources: Design, Physics and Performance 1st edition

Describes the design, physics, and performance of high density plasma sources which have been explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and other applications.

465 pages

Media Books     Hardcover Book   (Book with hard spine and cover)
Released December 31, 1996
ISBN13 9780815513773
Publishers William Andrew Publishing
Pages 465
Dimensions 236 × 161 × 34 mm   ·   816 g
Language English  
Contributor Oleg A. Popov

See all of Popov, Oleg A. (Matsushita Electric Works, Woburn, MA, USA) ( e.g. Hardcover Book )