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Microlithography: Science and Technology 3rd edition
Bruce W. Smith
Microlithography: Science and Technology 3rd edition
Bruce W. Smith
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.
900 pages, 570 black & white illustrations, 40 black & white tables
Media | Books Hardcover Book (Book with hard spine and cover) |
Released | May 20, 2020 |
ISBN13 | 9781439876756 |
Publishers | Taylor & Francis Inc |
Pages | 838 |
Dimensions | 1.62 kg |
Language | English |
Editor | Smith, Bruce W. |
Editor | Suzuki, Kazuaki |
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