Environmental, Safety, and Health Issues in IC Production: Volume 447 - MRS Proceedings - - Books - Materials Research Society - 9781558993518 - June 5, 1997
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Environmental, Safety, and Health Issues in IC Production: Volume 447 - MRS Proceedings

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Environmental, Safety, and Health Issues in IC Production: Volume 447 - MRS Proceedings

This book provides an overview of the available scientific information on environmentally benign IC production. A broad range of topics is addressed including work on resource reduction for chemicals, gases and DI water, reuse or recycling of chemicals, waste treatment strategies, environmentally friendly alternative technologies and analytical technologies for environmental studies.

154 pages

Media Books     Hardcover Book   (Book with hard spine and cover)
Released June 5, 1997
ISBN13 9781558993518
Publishers Materials Research Society
Pages 168
Dimensions 160 × 237 × 15 mm   ·   400 g
Editor Bowling, Allen
Editor Heyns, Marc
Editor Reif, Rafael (Massachusetts Institute of Technology)
Editor Tonti, Alessandro