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Ion Implantation in Semiconductors: Proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects May 24-28, 1971, Garmisch-Partenkirchen, Bavaria, Germany Softcover reprint of the original 1st ed. 1971 edition
Ingolf Ruge
Ion Implantation in Semiconductors: Proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects May 24-28, 1971, Garmisch-Partenkirchen, Bavaria, Germany Softcover reprint of the original 1st ed. 1971 edition
Ingolf Ruge
In recent years great progress has been made in the field of ion implantation, particularly with respect to applications in semiconductors. International Conference on Ion Implantation in Semiconductors within the rather short time of one year since the first conference was held in 1970 in Thousand Oaks, California.
532 pages, biography
Media | Books Paperback Book (Book with soft cover and glued back) |
Released | December 25, 2011 |
ISBN13 | 9783642806629 |
Publishers | Springer-Verlag Berlin and Heidelberg Gm |
Pages | 508 |
Dimensions | 170 × 244 × 27 mm · 839 g |
Editor | Graul, J. |
Editor | Ruge, Ingolf |